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Synthesis
- Integrated, modular CVS / CVD system
- reactors
- hot wall (resistance and HF-furnace)
- cold wall and
- microwave reactors
- precursor delivery systems for
- in situ and operando process analysis
- aerosol mass spectrometer (particles and molecular species)
- laser-induced fluorescence (gas temperature)
- mobile CVS reactor operated at synchrotron radiation facilities using X-ray scattering, diffraction and spectroscopy to investigate particle (trans-)formation processes
- modeling
Processing
- Colloids and films
- Colloidal dispersion
- Material inkjet printer
- Electrophoretic deposition
- UV-laser sintering
- Bulk materials
- Uniaxial pressing
- Sintering under controlled atmospheres and vacuum
- Spark-plasma sintering
- Lapping
Characterization