The increasing power density of LEDs requires phosphors of high thermal and chemical stability which sustain their luminescent properties under operating conditions. Inorganic phosphors are typically produced by solid state synthesis via mixing and thermal treatment of powders. The solid state diffusion processes are crucial for their successful conversion into efficient phosphors. Nanoscaled reactants containing Si3N4, AlN und GaN allow the production of homogeneous phosphors by sintering at low temperatures and for short times due to short diffusion distances. Nanoscaled nitrides may be generated by gas phase synthesis. This process allows the generation of materials of high purity required for the production of highly efficient phosphors. Gas phase synthesis is a cost effective process which has been successfully scaled from lab to industrial reactors for many nanoscaled materials.